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Customer Challenges

  • Multiple customers were struggling with developing automation solutions to solve unique problems related to wafer processing and wafer inspection to improve time to market.
  • QuEST created a fully SEMI standards compliant equipment automation solution framework – Falcon

Scope

  • Reliable and fully SEMI standards compliant automation software which enables the product to hit the right time to market

Solution

  • A complete factory automation solution IP developed by QuEST to ensure full compliance to SEMI GEM standards
  • Fully compliant to SEMI standards for both 200mm and 300mm set of standards
  • Implementation of SEMI standards - SEMI E4, E5, E30, E37, E39, E58, E84, E87, E90, E94, E116, Stream 12 (Wafermap), G84 (Stripmap)

Benefits

  • Reduced time to market
  • Fully compliant with all relevant SEMI standards
  • Passed Factory Acceptance Tests at first-go
  • Reduced factory acceptance test time and got equipment accepted in a short time

Features

Alarms – tested with more than 5000 alarms 

  • Events – tested with more than 10000 events
  • Variables – tested with more than 20000 variables
  • Process programs
  • Supports 15MB process program transfer
  • Takes a maximum of 15 seconds for huge data transfer
  • Open Transactions Supported -200
  • Spooling: Spool size 100MB
  • Trace: Supports concurrent traces, Supports trace re-initialization

Falcon Connect – Factory automation (GEM)